Advanced Energy

MKS Instruments claimed the company infringed upon a patent involving its ASTRON family of reactive gas generators used to dissociate gases in chamber cleaning. In two separate cases, different juries found Advanced Energy infringed patents with its RAPID product. One jury awarded MKS $4.2 million in damages and the other awarded MKS a $3 million settlement. (Oct-11-05) [FAB TECH]

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